Permanent magnet objective lenses for multicolumn electron-beam systems

Permanent magnet objective lenses for multicolumn electron-beam systems

10.1063/1.1353197

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Bibliographic Details
Main Authors: Khursheed, A., Yan, Z., Karuppiah, N.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/57044
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Institution: National University of Singapore
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Summary:10.1063/1.1353197

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