Permanent magnet objective lenses for multicolumn electron-beam systems

10.1063/1.1353197

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Bibliographic Details
Main Authors: Khursheed, A., Yan, Z., Karuppiah, N.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/57044
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-570442023-10-25T07:08:10Z Permanent magnet objective lenses for multicolumn electron-beam systems Khursheed, A. Yan, Z. Karuppiah, N. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.1353197 Review of Scientific Instruments 72 4 2106-2109 RSINA 2014-06-17T03:01:37Z 2014-06-17T03:01:37Z 2001-04 Article Khursheed, A., Yan, Z., Karuppiah, N. (2001-04). Permanent magnet objective lenses for multicolumn electron-beam systems. Review of Scientific Instruments 72 (4) : 2106-2109. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1353197 00346748 http://scholarbank.nus.edu.sg/handle/10635/57044 000167709500027 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1063/1.1353197
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Khursheed, A.
Yan, Z.
Karuppiah, N.
format Article
author Khursheed, A.
Yan, Z.
Karuppiah, N.
spellingShingle Khursheed, A.
Yan, Z.
Karuppiah, N.
Permanent magnet objective lenses for multicolumn electron-beam systems
author_sort Khursheed, A.
title Permanent magnet objective lenses for multicolumn electron-beam systems
title_short Permanent magnet objective lenses for multicolumn electron-beam systems
title_full Permanent magnet objective lenses for multicolumn electron-beam systems
title_fullStr Permanent magnet objective lenses for multicolumn electron-beam systems
title_full_unstemmed Permanent magnet objective lenses for multicolumn electron-beam systems
title_sort permanent magnet objective lenses for multicolumn electron-beam systems
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/57044
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