Redesign of the scanning electron microscope for parallel energy spectral acquisition

Redesign of the scanning electron microscope for parallel energy spectral acquisition

10.1016/j.ultramic.2007.04.001

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Bibliographic Details
Main Authors: Khursheed, A., Hoang, H.Q.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Electron energy spectrometers
Magnetic beam separator
Scanning electron microscope
Online Access:http://scholarbank.nus.edu.sg/handle/10635/57217
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Institution: National University of Singapore
Description
Summary:10.1016/j.ultramic.2007.04.001

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