Approaches for improving airflow uniformity in unidirectional flow cleanrooms

10.1016/S0360-1323(98)00028-6

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Main Authors: Cheng, M., Liu, G.R., Lam, K.Y., Cai, W.J., Lee, E.L.
Other Authors: MECHANICAL & PRODUCTION ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/57937
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-579372023-10-25T21:14:54Z Approaches for improving airflow uniformity in unidirectional flow cleanrooms Cheng, M. Liu, G.R. Lam, K.Y. Cai, W.J. Lee, E.L. MECHANICAL & PRODUCTION ENGINEERING INST OF HIGH PERFORMANCE COMPUTING 10.1016/S0360-1323(98)00028-6 Building and Environment 34 3 275-284 BUEND 2014-06-17T05:09:01Z 2014-06-17T05:09:01Z 1998-05-01 Article Cheng, M., Liu, G.R., Lam, K.Y., Cai, W.J., Lee, E.L. (1998-05-01). Approaches for improving airflow uniformity in unidirectional flow cleanrooms. Building and Environment 34 (3) : 275-284. ScholarBank@NUS Repository. https://doi.org/10.1016/S0360-1323(98)00028-6 03601323 http://scholarbank.nus.edu.sg/handle/10635/57937 000077345200005 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1016/S0360-1323(98)00028-6
author2 MECHANICAL & PRODUCTION ENGINEERING
author_facet MECHANICAL & PRODUCTION ENGINEERING
Cheng, M.
Liu, G.R.
Lam, K.Y.
Cai, W.J.
Lee, E.L.
format Article
author Cheng, M.
Liu, G.R.
Lam, K.Y.
Cai, W.J.
Lee, E.L.
spellingShingle Cheng, M.
Liu, G.R.
Lam, K.Y.
Cai, W.J.
Lee, E.L.
Approaches for improving airflow uniformity in unidirectional flow cleanrooms
author_sort Cheng, M.
title Approaches for improving airflow uniformity in unidirectional flow cleanrooms
title_short Approaches for improving airflow uniformity in unidirectional flow cleanrooms
title_full Approaches for improving airflow uniformity in unidirectional flow cleanrooms
title_fullStr Approaches for improving airflow uniformity in unidirectional flow cleanrooms
title_full_unstemmed Approaches for improving airflow uniformity in unidirectional flow cleanrooms
title_sort approaches for improving airflow uniformity in unidirectional flow cleanrooms
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/57937
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