Approaches for improving airflow uniformity in unidirectional flow cleanrooms

• Main Authors: Cheng, M., Liu, G.R., Lam, K.Y., Cai, W.J., Lee, E.L.
• Other Authors: MECHANICAL & PRODUCTION ENGINEERING
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/57937
• Institution: National University of Singapore

10.1016/S0360-1323(98)00028-6