Characterisation of pyramid formation arising from the TMAH etching of silicon

Sensors and Actuators, A: Physical

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Main Authors:	Choi, W.K., Thong, J.T.L., Luo, P., Tan, C.M., Chua, T.H., Bai, Y.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Etching parameters Pyramids Silicon Tetramethylammonium hydroxide (TMAH)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/57991
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-57991
record_format	dspace
spelling	sg-nus-scholar.10635-579912024-11-09T19:12:11Z Characterisation of pyramid formation arising from the TMAH etching of silicon Choi, W.K. Thong, J.T.L. Luo, P. Tan, C.M. Chua, T.H. Bai, Y. ELECTRICAL ENGINEERING MECHANICAL & PRODUCTION ENGINEERING Etching parameters Pyramids Silicon Tetramethylammonium hydroxide (TMAH) Sensors and Actuators, A: Physical 71 3 238-243 SAAPE 2014-06-17T05:09:37Z 2014-06-17T05:09:37Z 1998-12-01 Article Choi, W.K.,Thong, J.T.L.,Luo, P.,Tan, C.M.,Chua, T.H.,Bai, Y. (1998-12-01). Characterisation of pyramid formation arising from the TMAH etching of silicon. Sensors and Actuators, A: Physical 71 (3) : 238-243. ScholarBank@NUS Repository. 09244247 http://scholarbank.nus.edu.sg/handle/10635/57991 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Etching parameters Pyramids Silicon Tetramethylammonium hydroxide (TMAH)
spellingShingle	Etching parameters Pyramids Silicon Tetramethylammonium hydroxide (TMAH) Choi, W.K. Thong, J.T.L. Luo, P. Tan, C.M. Chua, T.H. Bai, Y. Characterisation of pyramid formation arising from the TMAH etching of silicon
description	Sensors and Actuators, A: Physical
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Choi, W.K. Thong, J.T.L. Luo, P. Tan, C.M. Chua, T.H. Bai, Y.
format	Article
author	Choi, W.K. Thong, J.T.L. Luo, P. Tan, C.M. Chua, T.H. Bai, Y.
author_sort	Choi, W.K.
title	Characterisation of pyramid formation arising from the TMAH etching of silicon
title_short	Characterisation of pyramid formation arising from the TMAH etching of silicon
title_full	Characterisation of pyramid formation arising from the TMAH etching of silicon
title_fullStr	Characterisation of pyramid formation arising from the TMAH etching of silicon
title_full_unstemmed	Characterisation of pyramid formation arising from the TMAH etching of silicon
title_sort	characterisation of pyramid formation arising from the tmah etching of silicon
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/57991
_version_	1821189115294515200

Characterisation of pyramid formation arising from the TMAH etching of silicon

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