Effect of etchant concentration and defects on pyramid formation in TMAH etched silicon
Bulletin of Materials Science
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2014
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sg-nus-scholar.10635-581702024-11-09T19:12:13Z Effect of etchant concentration and defects on pyramid formation in TMAH etched silicon Choi, W.K. Thong, J.T.L. Bai, Y. Newaskar, P. Luo, P. ELECTRICAL ENGINEERING MECHANICAL & PRODUCTION ENGINEERING Bulletin of Materials Science 22 3 615-621 BUMSD 2014-06-17T05:11:37Z 2014-06-17T05:11:37Z 1999-05 Article Choi, W.K.,Thong, J.T.L.,Bai, Y.,Newaskar, P.,Luo, P. (1999-05). Effect of etchant concentration and defects on pyramid formation in TMAH etched silicon. Bulletin of Materials Science 22 (3) : 615-621. ScholarBank@NUS Repository. 02504707 http://scholarbank.nus.edu.sg/handle/10635/58170 NOT_IN_WOS Scopus |
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National University of Singapore |
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Singapore Singapore |
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Bulletin of Materials Science |
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ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Choi, W.K. Thong, J.T.L. Bai, Y. Newaskar, P. Luo, P. |
| format |
Article |
| author |
Choi, W.K. Thong, J.T.L. Bai, Y. Newaskar, P. Luo, P. |
| spellingShingle |
Choi, W.K. Thong, J.T.L. Bai, Y. Newaskar, P. Luo, P. Effect of etchant concentration and defects on pyramid formation in TMAH etched silicon |
| author_sort |
Choi, W.K. |
| title |
Effect of etchant concentration and defects on pyramid formation in TMAH etched silicon |
| title_short |
Effect of etchant concentration and defects on pyramid formation in TMAH etched silicon |
| title_full |
Effect of etchant concentration and defects on pyramid formation in TMAH etched silicon |
| title_fullStr |
Effect of etchant concentration and defects on pyramid formation in TMAH etched silicon |
| title_full_unstemmed |
Effect of etchant concentration and defects on pyramid formation in TMAH etched silicon |
| title_sort |
effect of etchant concentration and defects on pyramid formation in tmah etched silicon |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/58170 |
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1821210889677701120 |