Effect of etchant concentration and defects on pyramid formation in TMAH etched silicon
Bulletin of Materials Science
Saved in:
| Main Authors: | , , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Published: |
2014
|
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/58170 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-58170 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-581702015-02-11T08:33:00Z Effect of etchant concentration and defects on pyramid formation in TMAH etched silicon Choi, W.K. Thong, J.T.L. Bai, Y. Newaskar, P. Luo, P. MECHANICAL & PRODUCTION ENGINEERING ELECTRICAL ENGINEERING Bulletin of Materials Science 22 3 615-621 BUMSD 2014-06-17T05:11:37Z 2014-06-17T05:11:37Z 1999-05 Article Choi, W.K.,Thong, J.T.L.,Bai, Y.,Newaskar, P.,Luo, P. (1999-05). Effect of etchant concentration and defects on pyramid formation in TMAH etched silicon. Bulletin of Materials Science 22 (3) : 615-621. ScholarBank@NUS Repository. 02504707 http://scholarbank.nus.edu.sg/handle/10635/58170 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
Bulletin of Materials Science |
| author2 |
MECHANICAL & PRODUCTION ENGINEERING |
| author_facet |
MECHANICAL & PRODUCTION ENGINEERING Choi, W.K. Thong, J.T.L. Bai, Y. Newaskar, P. Luo, P. |
| format |
Article |
| author |
Choi, W.K. Thong, J.T.L. Bai, Y. Newaskar, P. Luo, P. |
| spellingShingle |
Choi, W.K. Thong, J.T.L. Bai, Y. Newaskar, P. Luo, P. Effect of etchant concentration and defects on pyramid formation in TMAH etched silicon |
| author_sort |
Choi, W.K. |
| title |
Effect of etchant concentration and defects on pyramid formation in TMAH etched silicon |
| title_short |
Effect of etchant concentration and defects on pyramid formation in TMAH etched silicon |
| title_full |
Effect of etchant concentration and defects on pyramid formation in TMAH etched silicon |
| title_fullStr |
Effect of etchant concentration and defects on pyramid formation in TMAH etched silicon |
| title_full_unstemmed |
Effect of etchant concentration and defects on pyramid formation in TMAH etched silicon |
| title_sort |
effect of etchant concentration and defects on pyramid formation in tmah etched silicon |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/58170 |
| _version_ |
1681084998987284480 |