Investigations on the morphology of silicon surfaces anisotropically etched with TMAH

10.1016/S0921-5107(99)00507-3

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Bibliographic Details
Main Authors: Thong, J.T.L., Bai, Y., Luo, P., Choi, W.K.
Other Authors: MECHANICAL & PRODUCTION ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/80640
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Institution: National University of Singapore