Investigations on the morphology of silicon surfaces anisotropically etched with TMAH
10.1016/S0921-5107(99)00507-3
Saved in:
| Main Authors: | , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Published: |
2014
|
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/80640 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-80640 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-806402023-10-29T20:58:46Z Investigations on the morphology of silicon surfaces anisotropically etched with TMAH Thong, J.T.L. Bai, Y. Luo, P. Choi, W.K. MECHANICAL & PRODUCTION ENGINEERING ELECTRICAL ENGINEERING 10.1016/S0921-5107(99)00507-3 Materials Science and Engineering B: Solid-State Materials for Advanced Technology 72 2 177-179 MSBTE 2014-10-07T02:59:43Z 2014-10-07T02:59:43Z 2000-03-15 Article Thong, J.T.L., Bai, Y., Luo, P., Choi, W.K. (2000-03-15). Investigations on the morphology of silicon surfaces anisotropically etched with TMAH. Materials Science and Engineering B: Solid-State Materials for Advanced Technology 72 (2) : 177-179. ScholarBank@NUS Repository. https://doi.org/10.1016/S0921-5107(99)00507-3 09215107 http://scholarbank.nus.edu.sg/handle/10635/80640 000086130900026 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1016/S0921-5107(99)00507-3 |
| author2 |
MECHANICAL & PRODUCTION ENGINEERING |
| author_facet |
MECHANICAL & PRODUCTION ENGINEERING Thong, J.T.L. Bai, Y. Luo, P. Choi, W.K. |
| format |
Article |
| author |
Thong, J.T.L. Bai, Y. Luo, P. Choi, W.K. |
| spellingShingle |
Thong, J.T.L. Bai, Y. Luo, P. Choi, W.K. Investigations on the morphology of silicon surfaces anisotropically etched with TMAH |
| author_sort |
Thong, J.T.L. |
| title |
Investigations on the morphology of silicon surfaces anisotropically etched with TMAH |
| title_short |
Investigations on the morphology of silicon surfaces anisotropically etched with TMAH |
| title_full |
Investigations on the morphology of silicon surfaces anisotropically etched with TMAH |
| title_fullStr |
Investigations on the morphology of silicon surfaces anisotropically etched with TMAH |
| title_full_unstemmed |
Investigations on the morphology of silicon surfaces anisotropically etched with TMAH |
| title_sort |
investigations on the morphology of silicon surfaces anisotropically etched with tmah |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/80640 |
| _version_ |
1781783930765049856 |