Effects of non-parallel plates in a differential capacitive microaccelerometer
10.1088/0960-1317/9/4/301
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2014
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sg-nus-scholar.10635-582322023-10-26T07:34:39Z Effects of non-parallel plates in a differential capacitive microaccelerometer Tay, F.E.H. Jun, X. Liang, Y.C. Logeeswaran, V.J. Yufeng, Y. ELECTRICAL ENGINEERING MECHANICAL & PRODUCTION ENGINEERING 10.1088/0960-1317/9/4/301 Journal of Micromechanics and Microengineering 9 4 283-293 JMMIE 2014-06-17T05:12:17Z 2014-06-17T05:12:17Z 1999-12 Article Tay, F.E.H., Jun, X., Liang, Y.C., Logeeswaran, V.J., Yufeng, Y. (1999-12). Effects of non-parallel plates in a differential capacitive microaccelerometer. Journal of Micromechanics and Microengineering 9 (4) : 283-293. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/9/4/301 09601317 http://scholarbank.nus.edu.sg/handle/10635/58232 000084491500001 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1088/0960-1317/9/4/301 |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Tay, F.E.H. Jun, X. Liang, Y.C. Logeeswaran, V.J. Yufeng, Y. |
| format |
Article |
| author |
Tay, F.E.H. Jun, X. Liang, Y.C. Logeeswaran, V.J. Yufeng, Y. |
| spellingShingle |
Tay, F.E.H. Jun, X. Liang, Y.C. Logeeswaran, V.J. Yufeng, Y. Effects of non-parallel plates in a differential capacitive microaccelerometer |
| author_sort |
Tay, F.E.H. |
| title |
Effects of non-parallel plates in a differential capacitive microaccelerometer |
| title_short |
Effects of non-parallel plates in a differential capacitive microaccelerometer |
| title_full |
Effects of non-parallel plates in a differential capacitive microaccelerometer |
| title_fullStr |
Effects of non-parallel plates in a differential capacitive microaccelerometer |
| title_full_unstemmed |
Effects of non-parallel plates in a differential capacitive microaccelerometer |
| title_sort |
effects of non-parallel plates in a differential capacitive microaccelerometer |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/58232 |
| _version_ |
1781781508836556800 |