SCREAM micromachined high aspect ratio low-G microaccelerometer

SCREAM micromachined high aspect ratio low-G microaccelerometer

Proceedings of SPIE - The International Society for Optical Engineering

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Bibliographic Details
Main Authors: Tay, Francis E.H., Logeeswaran, V.J., Liang, Y.C.
Other Authors: ELECTRICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81729
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/81729

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