SCREAM micromachined high aspect ratio low-G microaccelerometer
Proceedings of SPIE - The International Society for Optical Engineering
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2014
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sg-nus-scholar.10635-817292015-01-08T02:51:40Z SCREAM micromachined high aspect ratio low-G microaccelerometer Tay, Francis E.H. Logeeswaran, V.J. Liang, Y.C. ELECTRICAL ENGINEERING MECHANICAL & PRODUCTION ENGINEERING Proceedings of SPIE - The International Society for Optical Engineering 4019 344-353 PSISD 2014-10-07T03:11:24Z 2014-10-07T03:11:24Z 2000 Conference Paper Tay, Francis E.H.,Logeeswaran, V.J.,Liang, Y.C. (2000). SCREAM micromachined high aspect ratio low-G microaccelerometer. Proceedings of SPIE - The International Society for Optical Engineering 4019 : 344-353. ScholarBank@NUS Repository. 0277786X http://scholarbank.nus.edu.sg/handle/10635/81729 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
Proceedings of SPIE - The International Society for Optical Engineering |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Tay, Francis E.H. Logeeswaran, V.J. Liang, Y.C. |
| format |
Conference or Workshop Item |
| author |
Tay, Francis E.H. Logeeswaran, V.J. Liang, Y.C. |
| spellingShingle |
Tay, Francis E.H. Logeeswaran, V.J. Liang, Y.C. SCREAM micromachined high aspect ratio low-G microaccelerometer |
| author_sort |
Tay, Francis E.H. |
| title |
SCREAM micromachined high aspect ratio low-G microaccelerometer |
| title_short |
SCREAM micromachined high aspect ratio low-G microaccelerometer |
| title_full |
SCREAM micromachined high aspect ratio low-G microaccelerometer |
| title_fullStr |
SCREAM micromachined high aspect ratio low-G microaccelerometer |
| title_full_unstemmed |
SCREAM micromachined high aspect ratio low-G microaccelerometer |
| title_sort |
scream micromachined high aspect ratio low-g microaccelerometer |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/81729 |
| _version_ |
1681089124200611840 |