Formation of pyramids at surface of TMAH etched silicon

Applied Surface Science

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Bibliographic Details
Main Authors:	Choi, W.K., Thong, J.T.L., Luo, P., Bai, Y., Tan, C.M., Chua, T.H.
Other Authors:	MECHANICAL & PRODUCTION ENGINEERING
Format:	Article
Published:	2014
Subjects:	Etching parameters Pyramids Silicon Tetramethylammonium hydroxide (TMAH)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/58302
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-58302
record_format	dspace
spelling	sg-nus-scholar.10635-583022015-01-09T18:40:52Z Formation of pyramids at surface of TMAH etched silicon Choi, W.K. Thong, J.T.L. Luo, P. Bai, Y. Tan, C.M. Chua, T.H. MECHANICAL & PRODUCTION ENGINEERING ELECTRICAL ENGINEERING Etching parameters Pyramids Silicon Tetramethylammonium hydroxide (TMAH) Applied Surface Science 144-145 0 472-475 ASUSE 2014-06-17T05:13:04Z 2014-06-17T05:13:04Z 1999-04 Article Choi, W.K.,Thong, J.T.L.,Luo, P.,Bai, Y.,Tan, C.M.,Chua, T.H. (1999-04). Formation of pyramids at surface of TMAH etched silicon. Applied Surface Science 144-145 (0) : 472-475. ScholarBank@NUS Repository. 01694332 http://scholarbank.nus.edu.sg/handle/10635/58302 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Etching parameters Pyramids Silicon Tetramethylammonium hydroxide (TMAH)
spellingShingle	Etching parameters Pyramids Silicon Tetramethylammonium hydroxide (TMAH) Choi, W.K. Thong, J.T.L. Luo, P. Bai, Y. Tan, C.M. Chua, T.H. Formation of pyramids at surface of TMAH etched silicon
description	Applied Surface Science
author2	MECHANICAL & PRODUCTION ENGINEERING
author_facet	MECHANICAL & PRODUCTION ENGINEERING Choi, W.K. Thong, J.T.L. Luo, P. Bai, Y. Tan, C.M. Chua, T.H.
format	Article
author	Choi, W.K. Thong, J.T.L. Luo, P. Bai, Y. Tan, C.M. Chua, T.H.
author_sort	Choi, W.K.
title	Formation of pyramids at surface of TMAH etched silicon
title_short	Formation of pyramids at surface of TMAH etched silicon
title_full	Formation of pyramids at surface of TMAH etched silicon
title_fullStr	Formation of pyramids at surface of TMAH etched silicon
title_full_unstemmed	Formation of pyramids at surface of TMAH etched silicon
title_sort	formation of pyramids at surface of tmah etched silicon
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/58302
_version_	1681085023441125376

Formation of pyramids at surface of TMAH etched silicon

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