Formation of pyramids at surface of TMAH etched silicon

Formation of pyramids at surface of TMAH etched silicon

Applied Surface Science

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Bibliographic Details
Main Authors: Choi, W.K., Thong, J.T.L., Luo, P., Bai, Y., Tan, C.M., Chua, T.H.
Other Authors: MECHANICAL & PRODUCTION ENGINEERING
Format: Article
Published: 2014
Subjects:
Etching parameters
Pyramids
Silicon
Tetramethylammonium hydroxide (TMAH)
Online Access:http://scholarbank.nus.edu.sg/handle/10635/58302
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/58302

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