Improvement of the UV curing process for the laser lithography technique

Improvement of the UV curing process for the laser lithography technique

Materials and Design

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Bibliographic Details
Main Authors: Fuh, J.Y.H., Choo, Y.S., Nee, A.Y.C., Lu, L., Lee, K.C.
Other Authors: MECHANICAL & PRODUCTION ENGINEERING
Format: Article
Published: 2014
Subjects:
3-D layer manufacturing
laser lithography
polymerization
rapid prototyping
Online Access:http://scholarbank.nus.edu.sg/handle/10635/58382
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/58382

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