Surface roughness measurement in the submicrometer range using laser scattering

10.1117/1.602535

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Bibliographic Details
Main Authors: Wang, S.H., Quan, C., Tay, C.J., Shang, H.M.
Other Authors: MECHANICAL & PRODUCTION ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/58753
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-587532023-10-26T21:27:47Z Surface roughness measurement in the submicrometer range using laser scattering Wang, S.H. Quan, C. Tay, C.J. Shang, H.M. MECHANICAL & PRODUCTION ENGINEERING 10.1117/1.602535 Optical Engineering 39 6 1597-1601 OPEGA 2014-06-17T05:18:03Z 2014-06-17T05:18:03Z 2000-06 Article Wang, S.H., Quan, C., Tay, C.J., Shang, H.M. (2000-06). Surface roughness measurement in the submicrometer range using laser scattering. Optical Engineering 39 (6) : 1597-1601. ScholarBank@NUS Repository. https://doi.org/10.1117/1.602535 00913286 http://scholarbank.nus.edu.sg/handle/10635/58753 000087526000023 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1117/1.602535
author2 MECHANICAL & PRODUCTION ENGINEERING
author_facet MECHANICAL & PRODUCTION ENGINEERING
Wang, S.H.
Quan, C.
Tay, C.J.
Shang, H.M.
format Article
author Wang, S.H.
Quan, C.
Tay, C.J.
Shang, H.M.
spellingShingle Wang, S.H.
Quan, C.
Tay, C.J.
Shang, H.M.
Surface roughness measurement in the submicrometer range using laser scattering
author_sort Wang, S.H.
title Surface roughness measurement in the submicrometer range using laser scattering
title_short Surface roughness measurement in the submicrometer range using laser scattering
title_full Surface roughness measurement in the submicrometer range using laser scattering
title_fullStr Surface roughness measurement in the submicrometer range using laser scattering
title_full_unstemmed Surface roughness measurement in the submicrometer range using laser scattering
title_sort surface roughness measurement in the submicrometer range using laser scattering
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/58753
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