Application of an optical interferometer for measuring the surface contour of micro-components

10.1088/0957-0233/17/4/002

Saved in:

Bibliographic Details
Main Authors:	Wang, S.H., Tay, C.J.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Fibre-end surface Micro-components Micromirror Optical interferometry Phase-shifting technique PZT Surface profile
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/59548
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-59548
record_format	dspace
spelling	sg-nus-scholar.10635-595482023-10-26T07:13:37Z Application of an optical interferometer for measuring the surface contour of micro-components Wang, S.H. Tay, C.J. MECHANICAL ENGINEERING Fibre-end surface Micro-components Micromirror Optical interferometry Phase-shifting technique PZT Surface profile 10.1088/0957-0233/17/4/002 Measurement Science and Technology 17 4 617-625 MSTCE 2014-06-17T06:12:45Z 2014-06-17T06:12:45Z 2006-04-01 Article Wang, S.H., Tay, C.J. (2006-04-01). Application of an optical interferometer for measuring the surface contour of micro-components. Measurement Science and Technology 17 (4) : 617-625. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-0233/17/4/002 09570233 http://scholarbank.nus.edu.sg/handle/10635/59548 000237497600004 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Fibre-end surface Micro-components Micromirror Optical interferometry Phase-shifting technique PZT Surface profile
spellingShingle	Fibre-end surface Micro-components Micromirror Optical interferometry Phase-shifting technique PZT Surface profile Wang, S.H. Tay, C.J. Application of an optical interferometer for measuring the surface contour of micro-components
description	10.1088/0957-0233/17/4/002
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Wang, S.H. Tay, C.J.
format	Article
author	Wang, S.H. Tay, C.J.
author_sort	Wang, S.H.
title	Application of an optical interferometer for measuring the surface contour of micro-components
title_short	Application of an optical interferometer for measuring the surface contour of micro-components
title_full	Application of an optical interferometer for measuring the surface contour of micro-components
title_fullStr	Application of an optical interferometer for measuring the surface contour of micro-components
title_full_unstemmed	Application of an optical interferometer for measuring the surface contour of micro-components
title_sort	application of an optical interferometer for measuring the surface contour of micro-components
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/59548
_version_	1781781651281412096

Application of an optical interferometer for measuring the surface contour of micro-components

Similar Items