Application of an optical interferometer for measuring the surface contour of micro-components
10.1088/0957-0233/17/4/002
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Main Authors: | Wang, S.H., Tay, C.J. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/59548 |
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Institution: | National University of Singapore |
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