Automatic classification of singular elements for the electrostatic analysis of microelectromechanical systems

10.1088/0960-1317/12/3/317

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Main Authors:	Su, Y., Ong, E.T., Lee, K.H.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/59604
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Institution:	National University of Singapore

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record_format	dspace
spelling	sg-nus-scholar.10635-596042023-10-30T20:22:05Z Automatic classification of singular elements for the electrostatic analysis of microelectromechanical systems Su, Y. Ong, E.T. Lee, K.H. MECHANICAL ENGINEERING 10.1088/0960-1317/12/3/317 Journal of Micromechanics and Microengineering 12 3 307-315 JMMIE 2014-06-17T06:13:26Z 2014-06-17T06:13:26Z 2002-05 Article Su, Y., Ong, E.T., Lee, K.H. (2002-05). Automatic classification of singular elements for the electrostatic analysis of microelectromechanical systems. Journal of Micromechanics and Microengineering 12 (3) : 307-315. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/12/3/317 09601317 http://scholarbank.nus.edu.sg/handle/10635/59604 000176057700017 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1088/0960-1317/12/3/317
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Su, Y. Ong, E.T. Lee, K.H.
format	Article
author	Su, Y. Ong, E.T. Lee, K.H.
spellingShingle	Su, Y. Ong, E.T. Lee, K.H. Automatic classification of singular elements for the electrostatic analysis of microelectromechanical systems
author_sort	Su, Y.
title	Automatic classification of singular elements for the electrostatic analysis of microelectromechanical systems
title_short	Automatic classification of singular elements for the electrostatic analysis of microelectromechanical systems
title_full	Automatic classification of singular elements for the electrostatic analysis of microelectromechanical systems
title_fullStr	Automatic classification of singular elements for the electrostatic analysis of microelectromechanical systems
title_full_unstemmed	Automatic classification of singular elements for the electrostatic analysis of microelectromechanical systems
title_sort	automatic classification of singular elements for the electrostatic analysis of microelectromechanical systems
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/59604
_version_	1781781664147439616

Automatic classification of singular elements for the electrostatic analysis of microelectromechanical systems

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