Automatic classification of singular elements for the electrostatic analysis of microelectromechanical systems
10.1088/0960-1317/12/3/317
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Main Authors: | Su, Y., Ong, E.T., Lee, K.H. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/59604 |
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Institution: | National University of Singapore |
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