Design and characterization of microelectromechanical system flow sensors using silicon nanowires

Design and characterization of microelectromechanical system flow sensors using silicon nanowires

10.1166/nnl.2011.1160

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Bibliographic Details
Main Authors: Lou, L., Lee, C., Xu, X., Kotlanka, R.K., Shao, L., Park, W.-T., Kwong, D.L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Flow sensor
MEMS
Silicon nanowire
Online Access:http://scholarbank.nus.edu.sg/handle/10635/69821
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/69821

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