Design and characterization of microelectromechanical system flow sensors using silicon nanowires

Design and characterization of microelectromechanical system flow sensors using silicon nanowires

10.1166/nnl.2011.1160

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Bibliographic Details
Main Authors: Lou, L., Lee, C., Xu, X., Kotlanka, R.K., Shao, L., Park, W.-T., Kwong, D.L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Flow sensor
MEMS
Silicon nanowire
Online Access:http://scholarbank.nus.edu.sg/handle/10635/69821
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Institution: National University of Singapore
id sg-nus-scholar.10635-69821
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spelling sg-nus-scholar.10635-698212023-10-25T20:15:39Z Design and characterization of microelectromechanical system flow sensors using silicon nanowires Lou, L. Lee, C. Xu, X. Kotlanka, R.K. Shao, L. Park, W.-T. Kwong, D.L. ELECTRICAL & COMPUTER ENGINEERING Flow sensor MEMS Silicon nanowire 10.1166/nnl.2011.1160 Nanoscience and Nanotechnology Letters 3 2 230-234 2014-06-19T03:05:04Z 2014-06-19T03:05:04Z 2011-04 Conference Paper Lou, L., Lee, C., Xu, X., Kotlanka, R.K., Shao, L., Park, W.-T., Kwong, D.L. (2011-04). Design and characterization of microelectromechanical system flow sensors using silicon nanowires. Nanoscience and Nanotechnology Letters 3 (2) : 230-234. ScholarBank@NUS Repository. https://doi.org/10.1166/nnl.2011.1160 19414900 http://scholarbank.nus.edu.sg/handle/10635/69821 000293211300023 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Flow sensor
MEMS
Silicon nanowire
spellingShingle Flow sensor
MEMS
Silicon nanowire
Lou, L.
Lee, C.
Xu, X.
Kotlanka, R.K.
Shao, L.
Park, W.-T.
Kwong, D.L.
Design and characterization of microelectromechanical system flow sensors using silicon nanowires
description 10.1166/nnl.2011.1160
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Lou, L.
Lee, C.
Xu, X.
Kotlanka, R.K.
Shao, L.
Park, W.-T.
Kwong, D.L.
format Conference or Workshop Item
author Lou, L.
Lee, C.
Xu, X.
Kotlanka, R.K.
Shao, L.
Park, W.-T.
Kwong, D.L.
author_sort Lou, L.
title Design and characterization of microelectromechanical system flow sensors using silicon nanowires
title_short Design and characterization of microelectromechanical system flow sensors using silicon nanowires
title_full Design and characterization of microelectromechanical system flow sensors using silicon nanowires
title_fullStr Design and characterization of microelectromechanical system flow sensors using silicon nanowires
title_full_unstemmed Design and characterization of microelectromechanical system flow sensors using silicon nanowires
title_sort design and characterization of microelectromechanical system flow sensors using silicon nanowires
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/69821
_version_ 1781783118509768704

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