Control-oriented modeling of 2D torsional micromirror

Control-oriented modeling of 2D torsional micromirror

10.1142/S0218194005001975

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Bibliographic Details
Main Authors: Zhao, Y., Tay, F.E.H., Chau, F.S., Zhou, G.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
MEMS
Micromirror
Modelling
Online Access:http://scholarbank.nus.edu.sg/handle/10635/59797
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Institution: National University of Singapore
Description
Summary:10.1142/S0218194005001975

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