Deposition of ultrathin fluoropolymer films on Si(100) and GaAs(100) surfaces by RF magnetron sputtering of poly(tetrafluoroethylene-co-hexafluoropropylene)

10.1021/jp0274031

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Main Authors:	Yang, G.H., Zhang, Y., Kang, E.T., Neoh, K.G.
Other Authors:	CHEMICAL & ENVIRONMENTAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/59854
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-598542023-09-21T21:13:42Z Deposition of ultrathin fluoropolymer films on Si(100) and GaAs(100) surfaces by RF magnetron sputtering of poly(tetrafluoroethylene-co-hexafluoropropylene) Yang, G.H. Zhang, Y. Kang, E.T. Neoh, K.G. CHEMICAL & ENVIRONMENTAL ENGINEERING MECHANICAL ENGINEERING 10.1021/jp0274031 Journal of Physical Chemistry B 107 12 2780-2787 JPCBF 2014-06-17T06:16:23Z 2014-06-17T06:16:23Z 2003-03-27 Article Yang, G.H., Zhang, Y., Kang, E.T., Neoh, K.G. (2003-03-27). Deposition of ultrathin fluoropolymer films on Si(100) and GaAs(100) surfaces by RF magnetron sputtering of poly(tetrafluoroethylene-co-hexafluoropropylene). Journal of Physical Chemistry B 107 (12) : 2780-2787. ScholarBank@NUS Repository. https://doi.org/10.1021/jp0274031 10895647 http://scholarbank.nus.edu.sg/handle/10635/59854 000181717600023 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1021/jp0274031
author2	CHEMICAL & ENVIRONMENTAL ENGINEERING
author_facet	CHEMICAL & ENVIRONMENTAL ENGINEERING Yang, G.H. Zhang, Y. Kang, E.T. Neoh, K.G.
format	Article
author	Yang, G.H. Zhang, Y. Kang, E.T. Neoh, K.G.
spellingShingle	Yang, G.H. Zhang, Y. Kang, E.T. Neoh, K.G. Deposition of ultrathin fluoropolymer films on Si(100) and GaAs(100) surfaces by RF magnetron sputtering of poly(tetrafluoroethylene-co-hexafluoropropylene)
author_sort	Yang, G.H.
title	Deposition of ultrathin fluoropolymer films on Si(100) and GaAs(100) surfaces by RF magnetron sputtering of poly(tetrafluoroethylene-co-hexafluoropropylene)
title_short	Deposition of ultrathin fluoropolymer films on Si(100) and GaAs(100) surfaces by RF magnetron sputtering of poly(tetrafluoroethylene-co-hexafluoropropylene)
title_full	Deposition of ultrathin fluoropolymer films on Si(100) and GaAs(100) surfaces by RF magnetron sputtering of poly(tetrafluoroethylene-co-hexafluoropropylene)
title_fullStr	Deposition of ultrathin fluoropolymer films on Si(100) and GaAs(100) surfaces by RF magnetron sputtering of poly(tetrafluoroethylene-co-hexafluoropropylene)
title_full_unstemmed	Deposition of ultrathin fluoropolymer films on Si(100) and GaAs(100) surfaces by RF magnetron sputtering of poly(tetrafluoroethylene-co-hexafluoropropylene)
title_sort	deposition of ultrathin fluoropolymer films on si(100) and gaas(100) surfaces by rf magnetron sputtering of poly(tetrafluoroethylene-co-hexafluoropropylene)
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/59854
_version_	1779169409823145984

Deposition of ultrathin fluoropolymer films on Si(100) and GaAs(100) surfaces by RF magnetron sputtering of poly(tetrafluoroethylene-co-hexafluoropropylene)

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