Characterization of fluoropolymer films deposited by magnetron sputtering of poly(tetrafluoroethylene) and plasma polymerization of heptadecafluoro-1-decene (HDFD) on (100)-oriented single-crystal silicon substrates

Characterization of fluoropolymer films deposited by magnetron sputtering of poly(tetrafluoroethylene) and plasma polymerization of heptadecafluoro-1-decene (HDFD) on (100)-oriented single-crystal silicon substrates

10.1002/sia.1243

Saved in:
Bibliographic Details
Main Authors: Zhang, Y., Yang, G.H., Kang, E.T., Neoh, K.G., Huang, W., Huan, A.C.H., Lai, D.M.Y.
Other Authors: CHEMICAL & ENVIRONMENTAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
FTIR
Plasma polymerization
PTFE
R.f. sputtering
ToF-SIMS
XPS
Online Access:http://scholarbank.nus.edu.sg/handle/10635/92471
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/92471

Similar Items