Characterization of fluoropolymer films deposited by magnetron sputtering of poly(tetrafluoroethylene) and plasma polymerization of heptadecafluoro-1-decene (HDFD) on (100)-oriented single-crystal silicon substrates
10.1002/sia.1243
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2014
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sg-nus-scholar.10635-924712023-11-01T07:15:12Z Characterization of fluoropolymer films deposited by magnetron sputtering of poly(tetrafluoroethylene) and plasma polymerization of heptadecafluoro-1-decene (HDFD) on (100)-oriented single-crystal silicon substrates Zhang, Y. Yang, G.H. Kang, E.T. Neoh, K.G. Huang, W. Huan, A.C.H. Lai, D.M.Y. CHEMICAL & ENVIRONMENTAL ENGINEERING PHYSICS FTIR Plasma polymerization PTFE R.f. sputtering ToF-SIMS XPS 10.1002/sia.1243 Surface and Interface Analysis 34 1 10-18 SIAND 2014-10-09T10:03:39Z 2014-10-09T10:03:39Z 2002-08 Conference Paper Zhang, Y., Yang, G.H., Kang, E.T., Neoh, K.G., Huang, W., Huan, A.C.H., Lai, D.M.Y. (2002-08). Characterization of fluoropolymer films deposited by magnetron sputtering of poly(tetrafluoroethylene) and plasma polymerization of heptadecafluoro-1-decene (HDFD) on (100)-oriented single-crystal silicon substrates. Surface and Interface Analysis 34 (1) : 10-18. ScholarBank@NUS Repository. https://doi.org/10.1002/sia.1243 01422421 http://scholarbank.nus.edu.sg/handle/10635/92471 000177885900004 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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FTIR Plasma polymerization PTFE R.f. sputtering ToF-SIMS XPS |
| spellingShingle |
FTIR Plasma polymerization PTFE R.f. sputtering ToF-SIMS XPS Zhang, Y. Yang, G.H. Kang, E.T. Neoh, K.G. Huang, W. Huan, A.C.H. Lai, D.M.Y. Characterization of fluoropolymer films deposited by magnetron sputtering of poly(tetrafluoroethylene) and plasma polymerization of heptadecafluoro-1-decene (HDFD) on (100)-oriented single-crystal silicon substrates |
| description |
10.1002/sia.1243 |
| author2 |
CHEMICAL & ENVIRONMENTAL ENGINEERING |
| author_facet |
CHEMICAL & ENVIRONMENTAL ENGINEERING Zhang, Y. Yang, G.H. Kang, E.T. Neoh, K.G. Huang, W. Huan, A.C.H. Lai, D.M.Y. |
| format |
Conference or Workshop Item |
| author |
Zhang, Y. Yang, G.H. Kang, E.T. Neoh, K.G. Huang, W. Huan, A.C.H. Lai, D.M.Y. |
| author_sort |
Zhang, Y. |
| title |
Characterization of fluoropolymer films deposited by magnetron sputtering of poly(tetrafluoroethylene) and plasma polymerization of heptadecafluoro-1-decene (HDFD) on (100)-oriented single-crystal silicon substrates |
| title_short |
Characterization of fluoropolymer films deposited by magnetron sputtering of poly(tetrafluoroethylene) and plasma polymerization of heptadecafluoro-1-decene (HDFD) on (100)-oriented single-crystal silicon substrates |
| title_full |
Characterization of fluoropolymer films deposited by magnetron sputtering of poly(tetrafluoroethylene) and plasma polymerization of heptadecafluoro-1-decene (HDFD) on (100)-oriented single-crystal silicon substrates |
| title_fullStr |
Characterization of fluoropolymer films deposited by magnetron sputtering of poly(tetrafluoroethylene) and plasma polymerization of heptadecafluoro-1-decene (HDFD) on (100)-oriented single-crystal silicon substrates |
| title_full_unstemmed |
Characterization of fluoropolymer films deposited by magnetron sputtering of poly(tetrafluoroethylene) and plasma polymerization of heptadecafluoro-1-decene (HDFD) on (100)-oriented single-crystal silicon substrates |
| title_sort |
characterization of fluoropolymer films deposited by magnetron sputtering of poly(tetrafluoroethylene) and plasma polymerization of heptadecafluoro-1-decene (hdfd) on (100)-oriented single-crystal silicon substrates |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/92471 |
| _version_ |
1781785792229670912 |