Characterization of fluoropolymer films deposited by magnetron sputtering of poly(tetrafluoroethylene) and plasma polymerization of heptadecafluoro-1-decene (HDFD) on (100)-oriented single-crystal silicon substrates

Characterization of fluoropolymer films deposited by magnetron sputtering of poly(tetrafluoroethylene) and plasma polymerization of heptadecafluoro-1-decene (HDFD) on (100)-oriented single-crystal silicon substrates

10.1002/sia.1243

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Bibliographic Details
Main Authors: Zhang, Y., Yang, G.H., Kang, E.T., Neoh, K.G., Huang, W., Huan, A.C.H., Lai, D.M.Y.
Other Authors: CHEMICAL & ENVIRONMENTAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
FTIR
Plasma polymerization
PTFE
R.f. sputtering
ToF-SIMS
XPS
Online Access:http://scholarbank.nus.edu.sg/handle/10635/92471
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Institution: National University of Singapore
Description
Summary:10.1002/sia.1243

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