Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method

10.1117/12.462877

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Bibliographic Details
Main Authors:	Chan, M.L., Tay, F.E.H., Logeeswaran, V.J., Zeng, K.Y., Shen, L., Chau, F.S.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	And cantilever Bending test Microgyroscope Nanoindentation Spring constant
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/60237
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-60237
record_format	dspace
spelling	sg-nus-scholar.10635-602372023-10-26T08:36:22Z Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method Chan, M.L. Tay, F.E.H. Logeeswaran, V.J. Zeng, K.Y. Shen, L. Chau, F.S. MECHANICAL ENGINEERING And cantilever Bending test Microgyroscope Nanoindentation Spring constant 10.1117/12.462877 Proceedings of SPIE - The International Society for Optical Engineering 4755 726-735 PSISD 2014-06-17T06:20:50Z 2014-06-17T06:20:50Z 2002 Article Chan, M.L., Tay, F.E.H., Logeeswaran, V.J., Zeng, K.Y., Shen, L., Chau, F.S. (2002). Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method. Proceedings of SPIE - The International Society for Optical Engineering 4755 : 726-735. ScholarBank@NUS Repository. https://doi.org/10.1117/12.462877 0277786X http://scholarbank.nus.edu.sg/handle/10635/60237 000176995300083 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	And cantilever Bending test Microgyroscope Nanoindentation Spring constant
spellingShingle	And cantilever Bending test Microgyroscope Nanoindentation Spring constant Chan, M.L. Tay, F.E.H. Logeeswaran, V.J. Zeng, K.Y. Shen, L. Chau, F.S. Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method
description	10.1117/12.462877
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Chan, M.L. Tay, F.E.H. Logeeswaran, V.J. Zeng, K.Y. Shen, L. Chau, F.S.
format	Article
author	Chan, M.L. Tay, F.E.H. Logeeswaran, V.J. Zeng, K.Y. Shen, L. Chau, F.S.
author_sort	Chan, M.L.
title	Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method
title_short	Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method
title_full	Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method
title_fullStr	Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method
title_full_unstemmed	Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method
title_sort	experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/60237
_version_	1781781796649697280

Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method

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