Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method

10.1023/A:1024824818808

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Bibliographic Details
Main Authors: Chan, M.L., Tay, F.E.H., Logeeswaran, V.J., Zeng, K.Y., Shen, L., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/60238
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Institution: National University of Singapore