Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method

10.1023/A:1024824818808

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Bibliographic Details
Main Authors:	Chan, M.L., Tay, F.E.H., Logeeswaran, V.J., Zeng, K.Y., Shen, L., Chau, F.S.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Bending test Cantilever Microgyroscope Nanoindentation Spring constant
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/60238
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-60238
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spelling	sg-nus-scholar.10635-602382023-10-25T21:29:47Z Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method Chan, M.L. Tay, F.E.H. Logeeswaran, V.J. Zeng, K.Y. Shen, L. Chau, F.S. MECHANICAL ENGINEERING Bending test Cantilever Microgyroscope Nanoindentation Spring constant 10.1023/A:1024824818808 Analog Integrated Circuits and Signal Processing 37 1 45-56 AICPE 2014-06-17T06:20:50Z 2014-06-17T06:20:50Z 2003-10 Article Chan, M.L., Tay, F.E.H., Logeeswaran, V.J., Zeng, K.Y., Shen, L., Chau, F.S. (2003-10). Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method. Analog Integrated Circuits and Signal Processing 37 (1) : 45-56. ScholarBank@NUS Repository. https://doi.org/10.1023/A:1024824818808 09251030 http://scholarbank.nus.edu.sg/handle/10635/60238 000184345600005 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Bending test Cantilever Microgyroscope Nanoindentation Spring constant
spellingShingle	Bending test Cantilever Microgyroscope Nanoindentation Spring constant Chan, M.L. Tay, F.E.H. Logeeswaran, V.J. Zeng, K.Y. Shen, L. Chau, F.S. Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method
description	10.1023/A:1024824818808
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Chan, M.L. Tay, F.E.H. Logeeswaran, V.J. Zeng, K.Y. Shen, L. Chau, F.S.
format	Article
author	Chan, M.L. Tay, F.E.H. Logeeswaran, V.J. Zeng, K.Y. Shen, L. Chau, F.S.
author_sort	Chan, M.L.
title	Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method
title_short	Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method
title_full	Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method
title_fullStr	Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method
title_full_unstemmed	Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method
title_sort	experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/60238
_version_	1781781796899258368

Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method

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