Fast and precise positioning of electrostatically actuated dual-axis micromirror by multi-loop digital control

10.1016/j.sna.2006.02.027

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Bibliographic Details
Main Authors:	Zhao, Y., Tay, F.E.H., Zhou, G., Chau, F.S.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Dual-axis micromirror MEMS Multi-loop control Positioning
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/60294
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-60294
record_format	dspace
spelling	sg-nus-scholar.10635-602942023-10-25T20:24:26Z Fast and precise positioning of electrostatically actuated dual-axis micromirror by multi-loop digital control Zhao, Y. Tay, F.E.H. Zhou, G. Chau, F.S. MECHANICAL ENGINEERING Dual-axis micromirror MEMS Multi-loop control Positioning 10.1016/j.sna.2006.02.027 Sensors and Actuators, A: Physical 132 2 421-428 SAAPE 2014-06-17T06:21:31Z 2014-06-17T06:21:31Z 2006-11-20 Article Zhao, Y., Tay, F.E.H., Zhou, G., Chau, F.S. (2006-11-20). Fast and precise positioning of electrostatically actuated dual-axis micromirror by multi-loop digital control. Sensors and Actuators, A: Physical 132 (2) : 421-428. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2006.02.027 09244247 http://scholarbank.nus.edu.sg/handle/10635/60294 000242513900001 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Dual-axis micromirror MEMS Multi-loop control Positioning
spellingShingle	Dual-axis micromirror MEMS Multi-loop control Positioning Zhao, Y. Tay, F.E.H. Zhou, G. Chau, F.S. Fast and precise positioning of electrostatically actuated dual-axis micromirror by multi-loop digital control
description	10.1016/j.sna.2006.02.027
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Zhao, Y. Tay, F.E.H. Zhou, G. Chau, F.S.
format	Article
author	Zhao, Y. Tay, F.E.H. Zhou, G. Chau, F.S.
author_sort	Zhao, Y.
title	Fast and precise positioning of electrostatically actuated dual-axis micromirror by multi-loop digital control
title_short	Fast and precise positioning of electrostatically actuated dual-axis micromirror by multi-loop digital control
title_full	Fast and precise positioning of electrostatically actuated dual-axis micromirror by multi-loop digital control
title_fullStr	Fast and precise positioning of electrostatically actuated dual-axis micromirror by multi-loop digital control
title_full_unstemmed	Fast and precise positioning of electrostatically actuated dual-axis micromirror by multi-loop digital control
title_sort	fast and precise positioning of electrostatically actuated dual-axis micromirror by multi-loop digital control
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/60294
_version_	1781781807994241024

Fast and precise positioning of electrostatically actuated dual-axis micromirror by multi-loop digital control

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