Force based displacement measurement in micromechanical devices

10.1063/1.1380398

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Bibliographic Details
Main Authors:	O'Shea, S.J., Ng, C.K., Tan, Y.Y., Xu, Y., Tay, E.H., Chua, B.L., Tien, N.C., Tang, X.S., Chen, W.T.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/60355
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-60355
record_format	dspace
spelling	sg-nus-scholar.10635-603552023-10-29T23:02:18Z Force based displacement measurement in micromechanical devices O'Shea, S.J. Ng, C.K. Tan, Y.Y. Xu, Y. Tay, E.H. Chua, B.L. Tien, N.C. Tang, X.S. Chen, W.T. MECHANICAL ENGINEERING 10.1063/1.1380398 Applied Physics Letters 78 25 4031-4033 APPLA 2014-06-17T06:22:14Z 2014-06-17T06:22:14Z 2001-06-18 Article O'Shea, S.J., Ng, C.K., Tan, Y.Y., Xu, Y., Tay, E.H., Chua, B.L., Tien, N.C., Tang, X.S., Chen, W.T. (2001-06-18). Force based displacement measurement in micromechanical devices. Applied Physics Letters 78 (25) : 4031-4033. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1380398 00036951 http://scholarbank.nus.edu.sg/handle/10635/60355 000169339800036 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.1380398
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING O'Shea, S.J. Ng, C.K. Tan, Y.Y. Xu, Y. Tay, E.H. Chua, B.L. Tien, N.C. Tang, X.S. Chen, W.T.
format	Article
author	O'Shea, S.J. Ng, C.K. Tan, Y.Y. Xu, Y. Tay, E.H. Chua, B.L. Tien, N.C. Tang, X.S. Chen, W.T.
spellingShingle	O'Shea, S.J. Ng, C.K. Tan, Y.Y. Xu, Y. Tay, E.H. Chua, B.L. Tien, N.C. Tang, X.S. Chen, W.T. Force based displacement measurement in micromechanical devices
author_sort	O'Shea, S.J.
title	Force based displacement measurement in micromechanical devices
title_short	Force based displacement measurement in micromechanical devices
title_full	Force based displacement measurement in micromechanical devices
title_fullStr	Force based displacement measurement in micromechanical devices
title_full_unstemmed	Force based displacement measurement in micromechanical devices
title_sort	force based displacement measurement in micromechanical devices
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/60355
_version_	1781781820047622144

Force based displacement measurement in micromechanical devices

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