Force based displacement measurement in micromechanical devices

• Main Authors: O'Shea, S.J., Ng, C.K., Tan, Y.Y., Xu, Y., Tay, E.H., Chua, B.L., Tien, N.C., Tang, X.S., Chen, W.T.
• Other Authors: MECHANICAL ENGINEERING
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/60355
• Institution: National University of Singapore

10.1063/1.1380398