Localized laser assisted eutectic bonding of quartz and silicon by Nd:YAG pulsed-laser
10.1016/j.sna.2004.11.035
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sg-nus-scholar.10635-606562024-11-12T19:00:15Z Localized laser assisted eutectic bonding of quartz and silicon by Nd:YAG pulsed-laser Tan, A.W.Y. Tay, F.E.H. MECHANICAL ENGINEERING Eutectic Gold-tin Laser bonding Low temperature Packaging Single crystal quartz-to-silicon 10.1016/j.sna.2004.11.035 Sensors and Actuators, A: Physical 120 2 550-561 SAAPE 2014-06-17T06:25:48Z 2014-06-17T06:25:48Z 2005-05-17 Article Tan, A.W.Y., Tay, F.E.H. (2005-05-17). Localized laser assisted eutectic bonding of quartz and silicon by Nd:YAG pulsed-laser. Sensors and Actuators, A: Physical 120 (2) : 550-561. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2004.11.035 09244247 http://scholarbank.nus.edu.sg/handle/10635/60656 000229298200034 Scopus |
| institution |
National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Eutectic Gold-tin Laser bonding Low temperature Packaging Single crystal quartz-to-silicon |
| spellingShingle |
Eutectic Gold-tin Laser bonding Low temperature Packaging Single crystal quartz-to-silicon Tan, A.W.Y. Tay, F.E.H. Localized laser assisted eutectic bonding of quartz and silicon by Nd:YAG pulsed-laser |
| description |
10.1016/j.sna.2004.11.035 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Tan, A.W.Y. Tay, F.E.H. |
| format |
Article |
| author |
Tan, A.W.Y. Tay, F.E.H. |
| author_sort |
Tan, A.W.Y. |
| title |
Localized laser assisted eutectic bonding of quartz and silicon by Nd:YAG pulsed-laser |
| title_short |
Localized laser assisted eutectic bonding of quartz and silicon by Nd:YAG pulsed-laser |
| title_full |
Localized laser assisted eutectic bonding of quartz and silicon by Nd:YAG pulsed-laser |
| title_fullStr |
Localized laser assisted eutectic bonding of quartz and silicon by Nd:YAG pulsed-laser |
| title_full_unstemmed |
Localized laser assisted eutectic bonding of quartz and silicon by Nd:YAG pulsed-laser |
| title_sort |
localized laser assisted eutectic bonding of quartz and silicon by nd:yag pulsed-laser |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/60656 |
| _version_ |
1821203727147597824 |