Localized laser assisted eutectic bonding of quartz and silicon by Nd:YAG pulsed-laser
10.1016/j.sna.2004.11.035
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Main Authors: | Tan, A.W.Y., Tay, F.E.H. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/60656 |
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Institution: | National University of Singapore |
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