Localized laser assisted eutectic bonding of quartz and silicon by Nd:YAG pulsed-laser

10.1016/j.sna.2004.11.035

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Bibliographic Details
Main Authors: Tan, A.W.Y., Tay, F.E.H.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/60656
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Institution: National University of Singapore

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