Localized laser assisted eutectic bonding of quartz and silicon by Nd:YAG pulsed-laser

• Main Authors: Tan, A.W.Y., Tay, F.E.H.
• 其他作者: MECHANICAL ENGINEERING
• 格式: Article
• 出版: 2014
• 主題: Eutectic; Gold-tin; Laser bonding; Low temperature; Packaging; Single crystal quartz-to-silicon
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/60656

10.1016/j.sna.2004.11.035