Soft lithography replication based on PDMS partial curing

10.1007/s00542-011-1273-3

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Bibliographic Details
Main Authors:	Yu, H., Zhou, G., Chau, F.S., Sinha, S.K.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/61332
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-61332
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spelling	sg-nus-scholar.10635-613322023-10-25T23:21:56Z Soft lithography replication based on PDMS partial curing Yu, H. Zhou, G. Chau, F.S. Sinha, S.K. MECHANICAL ENGINEERING 10.1007/s00542-011-1273-3 Microsystem Technologies 17 3 443-449 2014-06-17T06:33:49Z 2014-06-17T06:33:49Z 2011-03 Article Yu, H., Zhou, G., Chau, F.S., Sinha, S.K. (2011-03). Soft lithography replication based on PDMS partial curing. Microsystem Technologies 17 (3) : 443-449. ScholarBank@NUS Repository. https://doi.org/10.1007/s00542-011-1273-3 09467076 http://scholarbank.nus.edu.sg/handle/10635/61332 000289442600016 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1007/s00542-011-1273-3
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Yu, H. Zhou, G. Chau, F.S. Sinha, S.K.
format	Article
author	Yu, H. Zhou, G. Chau, F.S. Sinha, S.K.
spellingShingle	Yu, H. Zhou, G. Chau, F.S. Sinha, S.K. Soft lithography replication based on PDMS partial curing
author_sort	Yu, H.
title	Soft lithography replication based on PDMS partial curing
title_short	Soft lithography replication based on PDMS partial curing
title_full	Soft lithography replication based on PDMS partial curing
title_fullStr	Soft lithography replication based on PDMS partial curing
title_full_unstemmed	Soft lithography replication based on PDMS partial curing
title_sort	soft lithography replication based on pdms partial curing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/61332
_version_	1781782028623020032

Soft lithography replication based on PDMS partial curing

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