Spray coating of photoresist for 3D microstructures with different geometries

Spray coating of photoresist for 3D microstructures with different geometries

10.1088/1742-6596/34/1/155

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Bibliographic Details
Main Authors: Yu, L., Lee, Y.Y., Tay, F.E.H., Iliescu, C.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
MEMS
Photolithography
Spray Coating
Online Access:http://scholarbank.nus.edu.sg/handle/10635/61353
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Institution: National University of Singapore
Description
Summary:10.1088/1742-6596/34/1/155

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