Spray coating of photoresist for 3D microstructures with different geometries

10.1088/1742-6596/34/1/155

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Bibliographic Details
Main Authors:	Yu, L., Lee, Y.Y., Tay, F.E.H., Iliescu, C.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	MEMS Photolithography Spray Coating
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/61353
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-61353
record_format	dspace
spelling	sg-nus-scholar.10635-613532023-10-25T20:23:13Z Spray coating of photoresist for 3D microstructures with different geometries Yu, L. Lee, Y.Y. Tay, F.E.H. Iliescu, C. MECHANICAL ENGINEERING MEMS Photolithography Spray Coating 10.1088/1742-6596/34/1/155 Journal of Physics: Conference Series 34 1 937-942 2014-06-17T06:34:06Z 2014-06-17T06:34:06Z 2006-04-01 Article Yu, L., Lee, Y.Y., Tay, F.E.H., Iliescu, C. (2006-04-01). Spray coating of photoresist for 3D microstructures with different geometries. Journal of Physics: Conference Series 34 (1) : 937-942. ScholarBank@NUS Repository. https://doi.org/10.1088/1742-6596/34/1/155 17426588 http://scholarbank.nus.edu.sg/handle/10635/61353 000286667100155 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	MEMS Photolithography Spray Coating
spellingShingle	MEMS Photolithography Spray Coating Yu, L. Lee, Y.Y. Tay, F.E.H. Iliescu, C. Spray coating of photoresist for 3D microstructures with different geometries
description	10.1088/1742-6596/34/1/155
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Yu, L. Lee, Y.Y. Tay, F.E.H. Iliescu, C.
format	Article
author	Yu, L. Lee, Y.Y. Tay, F.E.H. Iliescu, C.
author_sort	Yu, L.
title	Spray coating of photoresist for 3D microstructures with different geometries
title_short	Spray coating of photoresist for 3D microstructures with different geometries
title_full	Spray coating of photoresist for 3D microstructures with different geometries
title_fullStr	Spray coating of photoresist for 3D microstructures with different geometries
title_full_unstemmed	Spray coating of photoresist for 3D microstructures with different geometries
title_sort	spray coating of photoresist for 3d microstructures with different geometries
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/61353
_version_	1781782032729243648

Spray coating of photoresist for 3D microstructures with different geometries

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