Stress gradient of a micro-optoelectromechanical systems Fabry-Perot cavity based on InP

Stress gradient of a micro-optoelectromechanical systems Fabry-Perot cavity based on InP

10.1117/1.3421968

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Bibliographic Details
Main Authors: Tay, C.J., Quan, C., Liu, H., Gopal, M., Akkipeddi, R.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Finite element analysis
InP-based Fabry-Perot cavity
MEMS
MOEMS
Stress gradient
Vertical scanning interferometry
Online Access:http://scholarbank.nus.edu.sg/handle/10635/61384
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Institution: National University of Singapore
Description
Summary:10.1117/1.3421968

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