Stress gradient of a micro-optoelectromechanical systems Fabry-Perot cavity based on InP

Stress gradient of a micro-optoelectromechanical systems Fabry-Perot cavity based on InP

10.1117/1.3421968

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Bibliographic Details
Main Authors: Tay, C.J., Quan, C., Liu, H., Gopal, M., Akkipeddi, R.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Finite element analysis
InP-based Fabry-Perot cavity
MEMS
MOEMS
Stress gradient
Vertical scanning interferometry
Online Access:http://scholarbank.nus.edu.sg/handle/10635/61384
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-613842023-10-26T07:09:42Z Stress gradient of a micro-optoelectromechanical systems Fabry-Perot cavity based on InP Tay, C.J. Quan, C. Liu, H. Gopal, M. Akkipeddi, R. MECHANICAL ENGINEERING Finite element analysis InP-based Fabry-Perot cavity MEMS MOEMS Stress gradient Vertical scanning interferometry 10.1117/1.3421968 Journal of Micro/ Nanolithography, MEMS, and MOEMS 9 2 - JMMMG 2014-06-17T06:34:27Z 2014-06-17T06:34:27Z 2010 Article Tay, C.J., Quan, C., Liu, H., Gopal, M., Akkipeddi, R. (2010). Stress gradient of a micro-optoelectromechanical systems Fabry-Perot cavity based on InP. Journal of Micro/ Nanolithography, MEMS, and MOEMS 9 (2) : -. ScholarBank@NUS Repository. https://doi.org/10.1117/1.3421968 19325150 http://scholarbank.nus.edu.sg/handle/10635/61384 000280222400011 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Finite element analysis
InP-based Fabry-Perot cavity
MEMS
MOEMS
Stress gradient
Vertical scanning interferometry
spellingShingle Finite element analysis
InP-based Fabry-Perot cavity
MEMS
MOEMS
Stress gradient
Vertical scanning interferometry
Tay, C.J.
Quan, C.
Liu, H.
Gopal, M.
Akkipeddi, R.
Stress gradient of a micro-optoelectromechanical systems Fabry-Perot cavity based on InP
description 10.1117/1.3421968
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Tay, C.J.
Quan, C.
Liu, H.
Gopal, M.
Akkipeddi, R.
format Article
author Tay, C.J.
Quan, C.
Liu, H.
Gopal, M.
Akkipeddi, R.
author_sort Tay, C.J.
title Stress gradient of a micro-optoelectromechanical systems Fabry-Perot cavity based on InP
title_short Stress gradient of a micro-optoelectromechanical systems Fabry-Perot cavity based on InP
title_full Stress gradient of a micro-optoelectromechanical systems Fabry-Perot cavity based on InP
title_fullStr Stress gradient of a micro-optoelectromechanical systems Fabry-Perot cavity based on InP
title_full_unstemmed Stress gradient of a micro-optoelectromechanical systems Fabry-Perot cavity based on InP
title_sort stress gradient of a micro-optoelectromechanical systems fabry-perot cavity based on inp
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/61384
_version_ 1781782038786867200

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