Tribo-functionalizing Si and SU8 materials by surface modification for application in MEMS/NEMS actuator-based devices
10.1088/0022-3727/44/1/015301
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2014
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sg-nus-scholar.10635-616222023-10-26T20:52:22Z Tribo-functionalizing Si and SU8 materials by surface modification for application in MEMS/NEMS actuator-based devices Singh, R.A. Satyanarayana, N. Kustandi, T.S. Sinha, S.K. MECHANICAL ENGINEERING 10.1088/0022-3727/44/1/015301 Journal of Physics D: Applied Physics 44 1 - JPAPB 2014-06-17T06:37:22Z 2014-06-17T06:37:22Z 2011-01-12 Article Singh, R.A., Satyanarayana, N., Kustandi, T.S., Sinha, S.K. (2011-01-12). Tribo-functionalizing Si and SU8 materials by surface modification for application in MEMS/NEMS actuator-based devices. Journal of Physics D: Applied Physics 44 (1) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0022-3727/44/1/015301 00223727 http://scholarbank.nus.edu.sg/handle/10635/61622 000285147400011 Scopus |
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Singapore Singapore |
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| description |
10.1088/0022-3727/44/1/015301 |
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MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Singh, R.A. Satyanarayana, N. Kustandi, T.S. Sinha, S.K. |
| format |
Article |
| author |
Singh, R.A. Satyanarayana, N. Kustandi, T.S. Sinha, S.K. |
| spellingShingle |
Singh, R.A. Satyanarayana, N. Kustandi, T.S. Sinha, S.K. Tribo-functionalizing Si and SU8 materials by surface modification for application in MEMS/NEMS actuator-based devices |
| author_sort |
Singh, R.A. |
| title |
Tribo-functionalizing Si and SU8 materials by surface modification for application in MEMS/NEMS actuator-based devices |
| title_short |
Tribo-functionalizing Si and SU8 materials by surface modification for application in MEMS/NEMS actuator-based devices |
| title_full |
Tribo-functionalizing Si and SU8 materials by surface modification for application in MEMS/NEMS actuator-based devices |
| title_fullStr |
Tribo-functionalizing Si and SU8 materials by surface modification for application in MEMS/NEMS actuator-based devices |
| title_full_unstemmed |
Tribo-functionalizing Si and SU8 materials by surface modification for application in MEMS/NEMS actuator-based devices |
| title_sort |
tribo-functionalizing si and su8 materials by surface modification for application in mems/nems actuator-based devices |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/61622 |
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1781782088384512000 |