Tribo-functionalizing Si and SU8 materials by surface modification for application in MEMS/NEMS actuator-based devices
10.1088/0022-3727/44/1/015301
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| Main Authors: | , , , |
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| 格式: | Article |
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2014
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| 在線閱讀: | http://scholarbank.nus.edu.sg/handle/10635/61622 |
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