Wafer level silicon mould fabrication and imprinting of high density microstructures

Wafer level silicon mould fabrication and imprinting of high density microstructures

10.1016/j.mee.2012.11.011

Saved in:
Bibliographic Details
Main Authors: Wong, T.I., Ong, H.Y., Lu, H.J., Tse, M.S., Quan, C.G., Ng, S.H., Zhou, X.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
DRIE
Glass
High density microstructures
Photolithography
Silicon mould
Thermal imprinting
Online Access:http://scholarbank.nus.edu.sg/handle/10635/61685
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
id sg-nus-scholar.10635-61685
record_format dspace
spelling sg-nus-scholar.10635-616852024-11-13T03:58:47Z Wafer level silicon mould fabrication and imprinting of high density microstructures Wong, T.I. Ong, H.Y. Lu, H.J. Tse, M.S. Quan, C.G. Ng, S.H. Zhou, X. MECHANICAL ENGINEERING DRIE Glass High density microstructures Photolithography Silicon mould Thermal imprinting 10.1016/j.mee.2012.11.011 Microelectronic Engineering 104 64-68 MIENE 2014-06-17T06:38:07Z 2014-06-17T06:38:07Z 2013 Article Wong, T.I., Ong, H.Y., Lu, H.J., Tse, M.S., Quan, C.G., Ng, S.H., Zhou, X. (2013). Wafer level silicon mould fabrication and imprinting of high density microstructures. Microelectronic Engineering 104 : 64-68. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mee.2012.11.011 01679317 http://scholarbank.nus.edu.sg/handle/10635/61685 000315245000013 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic DRIE
Glass
High density microstructures
Photolithography
Silicon mould
Thermal imprinting
spellingShingle DRIE
Glass
High density microstructures
Photolithography
Silicon mould
Thermal imprinting
Wong, T.I.
Ong, H.Y.
Lu, H.J.
Tse, M.S.
Quan, C.G.
Ng, S.H.
Zhou, X.
Wafer level silicon mould fabrication and imprinting of high density microstructures
description 10.1016/j.mee.2012.11.011
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Wong, T.I.
Ong, H.Y.
Lu, H.J.
Tse, M.S.
Quan, C.G.
Ng, S.H.
Zhou, X.
format Article
author Wong, T.I.
Ong, H.Y.
Lu, H.J.
Tse, M.S.
Quan, C.G.
Ng, S.H.
Zhou, X.
author_sort Wong, T.I.
title Wafer level silicon mould fabrication and imprinting of high density microstructures
title_short Wafer level silicon mould fabrication and imprinting of high density microstructures
title_full Wafer level silicon mould fabrication and imprinting of high density microstructures
title_fullStr Wafer level silicon mould fabrication and imprinting of high density microstructures
title_full_unstemmed Wafer level silicon mould fabrication and imprinting of high density microstructures
title_sort wafer level silicon mould fabrication and imprinting of high density microstructures
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/61685
_version_ 1821226532768579584

Similar Items