Wafer level silicon mould fabrication and imprinting of high density microstructures

Wafer level silicon mould fabrication and imprinting of high density microstructures

10.1016/j.mee.2012.11.011

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Bibliographic Details
Main Authors: Wong, T.I., Ong, H.Y., Lu, H.J., Tse, M.S., Quan, C.G., Ng, S.H., Zhou, X.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
DRIE
Glass
High density microstructures
Photolithography
Silicon mould
Thermal imprinting
Online Access:http://scholarbank.nus.edu.sg/handle/10635/61685
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Institution: National University of Singapore

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