Microstructures formed on silicon wafer by CO2 laser irradiation

Microstructures formed on silicon wafer by CO2 laser irradiation

10.1117/12.456859

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Bibliographic Details
Main Authors: Weijie, W., Feng, L.Y., Chenwu, A., Minghui, H.
Other Authors: DATA STORAGE INSTITUTE
Format: Conference or Workshop Item
Published: 2014
Subjects:
And capillary effect
Microstructure
Opto-electronic effect
Periodic fringes
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83952
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/83952

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