Microstructures formed on silicon wafer by CO2 laser irradiation

• Main Authors: Weijie, W., Feng, L.Y., Chenwu, A., Minghui, H.
• 其他作者: ELECTRICAL & COMPUTER ENGINEERING
• 格式: Conference or Workshop Item
• 出版: 2014
• 主題: And capillary effect; Microstructure; Opto-electronic effect; Periodic fringes
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/83952

10.1117/12.456859