Microstructures formed on silicon wafer by CO2 laser irradiation

10.1117/12.456859

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Bibliographic Details
Main Authors:	Weijie, W., Feng, L.Y., Chenwu, A., Minghui, H.
Other Authors:	DATA STORAGE INSTITUTE
Format:	Conference or Workshop Item
Published:	2014
Subjects:	And capillary effect Microstructure Opto-electronic effect Periodic fringes
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83952
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Institution:	National University of Singapore

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