Microstructures formed on silicon wafer by CO2 laser irradiation

10.1117/12.456859

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Bibliographic Details
Main Authors:	Weijie, W., Feng, L.Y., Chenwu, A., Minghui, H.
Other Authors:	DATA STORAGE INSTITUTE
Format:	Conference or Workshop Item
Published:	2014
Subjects:	And capillary effect Microstructure Opto-electronic effect Periodic fringes
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83952
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83952
record_format	dspace
spelling	sg-nus-scholar.10635-839522023-10-29T20:48:07Z Microstructures formed on silicon wafer by CO2 laser irradiation Weijie, W. Feng, L.Y. Chenwu, A. Minghui, H. DATA STORAGE INSTITUTE ELECTRICAL & COMPUTER ENGINEERING And capillary effect Microstructure Opto-electronic effect Periodic fringes 10.1117/12.456859 Proceedings of SPIE - The International Society for Optical Engineering 4426 166-169 PSISD 2014-10-07T04:47:05Z 2014-10-07T04:47:05Z 2002 Conference Paper Weijie, W., Feng, L.Y., Chenwu, A., Minghui, H. (2002). Microstructures formed on silicon wafer by CO2 laser irradiation. Proceedings of SPIE - The International Society for Optical Engineering 4426 : 166-169. ScholarBank@NUS Repository. https://doi.org/10.1117/12.456859 0277786X http://scholarbank.nus.edu.sg/handle/10635/83952 000176422100037 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	And capillary effect Microstructure Opto-electronic effect Periodic fringes
spellingShingle	And capillary effect Microstructure Opto-electronic effect Periodic fringes Weijie, W. Feng, L.Y. Chenwu, A. Minghui, H. Microstructures formed on silicon wafer by CO2 laser irradiation
description	10.1117/12.456859
author2	DATA STORAGE INSTITUTE
author_facet	DATA STORAGE INSTITUTE Weijie, W. Feng, L.Y. Chenwu, A. Minghui, H.
format	Conference or Workshop Item
author	Weijie, W. Feng, L.Y. Chenwu, A. Minghui, H.
author_sort	Weijie, W.
title	Microstructures formed on silicon wafer by CO2 laser irradiation
title_short	Microstructures formed on silicon wafer by CO2 laser irradiation
title_full	Microstructures formed on silicon wafer by CO2 laser irradiation
title_fullStr	Microstructures formed on silicon wafer by CO2 laser irradiation
title_full_unstemmed	Microstructures formed on silicon wafer by CO2 laser irradiation
title_sort	microstructures formed on silicon wafer by co2 laser irradiation
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83952
_version_	1781784409481936896

Microstructures formed on silicon wafer by CO2 laser irradiation

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