Noise characteristics of radio frequency sputtered amorphous silicon carbide films

Journal of Applied Physics

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Main Authors: Choi, W.K., Han, L.J., Chua, L.G.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/62486
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-624862015-02-05T19:47:42Z Noise characteristics of radio frequency sputtered amorphous silicon carbide films Choi, W.K. Han, L.J. Chua, L.G. ELECTRICAL ENGINEERING Journal of Applied Physics 84 9 5057-5059 JAPIA 2014-06-17T06:51:36Z 2014-06-17T06:51:36Z 1998-11-01 Article Choi, W.K.,Han, L.J.,Chua, L.G. (1998-11-01). Noise characteristics of radio frequency sputtered amorphous silicon carbide films. Journal of Applied Physics 84 (9) : 5057-5059. ScholarBank@NUS Repository. 00218979 http://scholarbank.nus.edu.sg/handle/10635/62486 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Journal of Applied Physics
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
Choi, W.K.
Han, L.J.
Chua, L.G.
format Article
author Choi, W.K.
Han, L.J.
Chua, L.G.
spellingShingle Choi, W.K.
Han, L.J.
Chua, L.G.
Noise characteristics of radio frequency sputtered amorphous silicon carbide films
author_sort Choi, W.K.
title Noise characteristics of radio frequency sputtered amorphous silicon carbide films
title_short Noise characteristics of radio frequency sputtered amorphous silicon carbide films
title_full Noise characteristics of radio frequency sputtered amorphous silicon carbide films
title_fullStr Noise characteristics of radio frequency sputtered amorphous silicon carbide films
title_full_unstemmed Noise characteristics of radio frequency sputtered amorphous silicon carbide films
title_sort noise characteristics of radio frequency sputtered amorphous silicon carbide films
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/62486
_version_ 1681085784597200896