Room temperature synthesis of c-AIN thin films by nitrogen-ion-assisted pulsed laser deposition

Room temperature synthesis of c-AIN thin films by nitrogen-ion-assisted pulsed laser deposition

Journal of Applied Physics

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Bibliographic Details
Main Authors: Ren, Z.M., Lu, Y.F., Ni, H.Q., Liew, T.Y.F., Cheong, B.A., Chow, S.K., Ng, M.L., Wang, J.P.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/62727
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Institution: National University of Singapore
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Summary:Journal of Applied Physics

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